A modular structure for a highly detailed model of semiconductor manufacturing

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A modular structure for a highly detailed model of semiconductor manufacturing

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Winter Simulation Conference archive
Proceedings of the 21st conference on Winter simulation table of contents

Washington, D.C., United States

Pages: 811 - 817

Year of Publication: 1989

ISBN:0-911801-58-8

Authors

S. J. Hood
E. B. Amamoto
A. T. Vandenberge

Sponsors

IIE : Institute of Industrial Engineers
NIST : National Institue of Standards & Technology
SES : SES
TIMS/CS :
IEEE-CS : Computer Society
ORSA : Operations Research Society of America
SIGSIM: ACM Special Interest Group on Simulation and Modeling

Publisher

ACM New York, NY, USA

Bibliometrics

Downloads (6 Weeks): 3, Downloads (12 Months): 5, Citation Count: 6

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ABSTRACT

A model of semiconductor manufacturing lines, using the discrete event simulation language, SIMAN, is described. A detailed, flexible, and generic model of this large, complex system was constructed by using a highly modular structure. A user interacts with the model through an interface which requires no programming and no recompiling even if major changes to the process sequence, number of resources (tools and operators), queue control, or number of job types are made.

REFERENCES

Note: OCR errors may be found in this Reference List extracted from the full text article. ACM has opted to expose the complete List rather than only correct and linked references.

Pegden, C. Dennis (1987). Introduction to SIMAN. Systems Modeling Corporation, 504 Beaver Street, Sewickley, PA 15143.

CITED BY 6

	Frank D. Chance, Conjectured upper bounds on transient mean total waiting times in queuing networks, Proceedings of the 25th conference on Winter simulation, p.414-421, December 12-15, 1993, Los Angeles, California, United States
	Sarah J. Hood , Peter D. Welch, Experimental design issues in simulation with examples from semiconductor manufacturing, Proceedings of the 24th conference on Winter simulation, p.255-263, December 13-16, 1992, Arlington, Virginia, United States
	Sarah J. Hood , Peter D. Welch, The application of experimental design to the analysis of semiconductor manufacturing lines, Proceedings of the 22nd conference on Winter simulation, p.303-309, December 09-12, 1990, New Orleans, Louisiana, United States
	Sarah J. Hood , Peter D. Welch, Response surface methodology and its application in simulation, Proceedings of the 25th conference on Winter simulation, p.115-122, December 12-15, 1993, Los Angeles, California, United States
	Pierre Lefrançois , Pierre L'Espérance , Marc Turmel, Batching annealing operations to optimize queueing times and furnance efficiency: a simulation model, Proceedings of the 23rd conference on Winter simulation, p.270-279, December 08-11, 1991, Phoenix, Arizona, United States
	David J. Miller, The role of simulation in semiconductor logistics, Proceedings of the 26th conference on Winter simulation, p.885-891, December 11-14, 1994, Orlando, Florida, United States