Monte-Carlo algorithms for layout density control

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Monte-Carlo algorithms for layout density control

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Asia and South Pacific Design Automation Conference archive
Proceedings of the 2000 Asia and South Pacific Design Automation Conference table of contents

Yokohama, Japan

Pages: 523 - 528

Year of Publication: 2000

ISBN:0-7803-5974-7

Authors

Yu Chen	UCLA Department of Computer Science, Los Angeles, CA
Andrew B. Kahng	UCLA Department of Computer Science, Los Angeles, CA
Gabriel Robins	Department of Computer Science, University of Virginia, Charlottesville, VA
Alex Zelikovsky	Department of Computer Science, Georgia State University, Atlanta, GA

Sponsors

IEEE-CAS : Circuits & Systems
IPSJ : Information Processing Society of Japan
SIGDA: ACM Special Interest Group on Design Automation
IEICE : Inst of Electronics, Info & Communication Engineers

Publisher

ACM New York, NY, USA

Bibliometrics

Downloads (6 Weeks): 4, Downloads (12 Months): 13, Citation Count: 7

Additional Information:

references cited by collaborative colleagues

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REFERENCES

Note: OCR errors may be found in this Reference List extracted from the full text article. ACM has opted to expose the complete List rather than only correct and linked references.

	1	R. R. Divecha, B. E. Stine, D. O. Ouma, J. U. Yoon, D. S. Boning, J. E. Chung, O. S. Nakagawa, and S. Y. Oh, Effect of Fine-line Density and Pitch on Interconnect ILD Thickness Variation in Oxide CMP Process, in Proc. CMP-MIC, Santa Clara, February 1998.
	2	http://www.itrs.net/. See also SIA, The National Technology Roadmap for Semiconductors, Semiconductor Industry Association, December 1997.
	3	Andrew B. Kahng , Gabriel Robins , Anish Singh , Huijuan Wang , Alexander Zelikovsky, Filling and slotting: analysis and algorithms, Proceedings of the 1998 international symposium on Physical design, p.95-102, April 06-08, 1998, Monterey, California, United States [doi>10.1145/274535.274549]
	4	A. B. Kahng , G. Robins , A. Singh , A. Zelikovsky, New and Exact Filling Algorithms for Layout Density Control, Proceedings of the 12th International Conference on VLSI Design - 'VLSI for the Information Appliance', p.106, January 10-13, 1999
	5	A. B. Kahng , G. Robins , A. Singh , A. Zelikovsky, New and Exact Filling Algorithms for Layout Density Control, Proceedings of the 12th International Conference on VLSI Design - 'VLSI for the Information Appliance', p.106, January 10-13, 1999
	6	A. B. Kahng, G. Robins, A. Singh, and A. Zelikovsky, Filling Algorithms and Analyses for Layout Density Control, IEEE Trans. Computer-Aided Design, 18 (1999), pp. 445-462.
	7	H. Landis, P. Burke, W. Cote, W. Hill, C. Hoffman, C. Kaanta, C. Koburger, W. Lange, M. Leach, and S. Luce, Integration of Chemical-Mechanical Polishing into CMOS Integrated Circuit Manufacturing, Thin Solid Films, 220 (1992), pp. 1-7.
	8	W. Maly, Moore's law and physical design of ICs, Proceedings of the 1998 international symposium on Physical design, p.36, April 06-08, 1998, Monterey, California, United States [doi>10.1145/274535.274540]
	9	G. Nanz and L. E. Camilletti, Modeling of Chemical- Mechanical Polishing: A Review, IEEE Trans. on Semiconductor Manufacturing, 8 (1995), pp. 382-389.
	10	B. E. Stine, D. S. Boning, J. E. Chung, and L. Camilletti, The Physical and Electrical Effects of Metal-fill Patterning Practices for Oxide Chemical-Mechanical Polishing Processes, IEEE Transactions on Electron Devices, 45 (1998), pp. 665- 679.
	11	Ruiqi Tian , D. F. Wong , Robert Boone , Alfred Reich, Dummy Feature Placement for Oxide Chemical-mechanical PolishingManufacturability, University of Texas at Austin, Austin, TX, 1999
	12	M. Tomozawa, Oxide CMP Mechanisms, Solid State Technology, (1997), pp. 169-175.

CITED BY 7

	Yu Chen , Andrew B. Kahng , Gabriel Robins , Alexander Zelikovsky, Hierarchical dummy fill for process uniformity, Proceedings of the 2001 conference on Asia South Pacific design automation, p.139-144, January 2001, Yokohama, Japan
	Yu Chen , Andrew B. Kahng , Gabriel Robins , Alexander Zelikovsky, Practical iterated fill synthesis for CMP uniformity, Proceedings of the 37th conference on Design automation, p.671-674, June 05-09, 2000, Los Angeles, California, United States
	Yu Chen , Andrew B. Kahng , Gabriel Robins , Alexander Zelikovsky, Closing the smoothness and uniformity gap in area fill synthesis, Proceedings of the 2002 international symposium on Physical design, April 07-10, 2002, San Diego, CA, USA
	Hua Xiang , Kai-Yuan Chao , Ruchir Puri , Martin D.F. Wong, Is your layout density verification exact?: a fast exact algorithm for density calculation, Proceedings of the 2007 international symposium on Physical design, March 18-21, 2007, Austin, Texas, USA
	Yanming Jia , Yici Cai , Xianlong Hong, Dummy fill aware buffer insertion during routing, Proceedings of the 17th great lakes symposium on Great lakes symposium on VLSI, March 11-13, 2007, Stresa-Lago Maggiore, Italy
	Yu Chen , Andrew B. Kahng , Gabriel Robins , Alexander Zelikovsky , Yuhong Zheng, Area Fill Generation With Inherent Data Volume Reduction, Proceedings of the conference on Design, Automation and Test in Europe, p.10868, March 03-07, 2003
	Subarna Sinha , Charles C. Chiang, A methodology for fast and accurate yield factor estimation during global routing, Proceedings of the 2007 IEEE/ACM international conference on Computer-aided design, November 05-08, 2007, San Jose, California

Collaborative Colleagues:

Yu Chen: colleagues

Andrew B. Kahng: colleagues

Gabriel Robins: colleagues

Alex Zelikovsky: colleagues

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