Simulating semiconductor manufacturing systems: successes, failures, and deep questions

ABSTRACT

Over the past several years, engineers at Intel Corporation have used modeling and simulation techniques to solve various high volume manufacturing problems. Our current goal is to use a persistent model over the entire life cycle of a factory to promote integration and continuous improvement of all of the components of the manufacturing system. The uses of this model are detailed as well as our progress towards realization of this goal. A summary of problems that we have encountered along the way is included as both a warning to those who have a similar goal and as a work list for vendors of simulation packages. Two disturbing questions about the basis of manufacturing simulation are asked that should be of concern to practicing simulation engineers as well as university researchers.

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