Fabrication and performance of mesa interconnect

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Fabrication and performance of mesa interconnect

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International Symposium on Low Power Electronics and Design archive
Proceedings of the 1996 international symposium on Low power electronics and design table of contents

Monterey, California, United States

Pages: 133 - 137

Year of Publication: 1996

ISBN:0-7803-3571-6

Authors

L. Carley	Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA
D. Guillou	Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA
S. Santhanam	Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA

Sponsors

IEEE-CAS : Circuits & Systems
IEEE-SSCS : Solid Stat Circuits Council
SIGDA: ACM Special Interest Group on Design Automation

Publisher

IEEE Press Piscataway, NJ, USA

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Downloads (6 Weeks): 2, Downloads (12 Months): 6, Citation Count: 0

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REFERENCES

Note: OCR errors may be found in this Reference List extracted from the full text article. ACM has opted to expose the complete List rather than only correct and linked references.

	1	L.R. Carley, "Methodology for reducing capacitance in integrated circuit interconnect structures", U.S. patent pending
	2	G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, and L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process," Proceedings of the IEEE 9th International Workshop on Micro Electro Mechanical Systems, San Diego, CA USA, Feb. 11-15, 1996
	3	L.R. Carley, M.L. Reed, G.K. Fedder, and S. Santhanam, "Microelectromechanical data storage apparatus and method for fabricating same", U.S. patent pending
	4	L.Wissel, D. Stout, and N. Buck, "Gate-array library design using local interconnect", Proc. Custom Integrated Circuits Conf., pp. 509-512, San Diego, CA USA, May 1996
	5	M. Parameswaran, H. E Baltes, L. Ristic, A. C. Dhaded, and A. M. Robinson, "A new approach for the fabrication of micromechanical structures," Sensors and Actuators, vol. 19, no. 3, pp. 289-307, Sept. 1989.