Automatic generation of simulation models for semiconductor manufacturing

ABSTRACT

This article gives an overview of a framework for automatically generating large-scale simulation models from a domain specific problem definition data schema, here semiconductor manufacturing. This simulation model uses an object-oriented Petri net data structure. The Petri net based simulation uses the same enabling rules as classical Petri nets, but has extensions of time and priorities. This approach minimizes the effort of model verification. Each object identified in the problem data specification is mapped to corresponding Petri net fragments. The Petri net simulation model is synthesized from verifiable subnets. This allows ensuring the liveness of the final Petri net simulation model. The applicability of this approach is demonstrated by generating a simulation model based on the Sematech data set.

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