| The use of slow down factors for the analysis and development of scheduling algorithms for parallel cluster tools |
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Winter Simulation Conference
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Proceedings of the 38th conference on Winter simulation
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Monterey, California
SESSION: Semiconductor manufacturing: dispatching and scheduling approaches
table of contents
Pages: 1840 - 1847
Year of Publication: 2006
ISBN:1-4244-0501-7
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Winter Simulation Conference
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Downloads (6 Weeks): 4, Downloads (12 Months): 11, Citation Count: 1
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 ABSTRACT
In this paper, we describe the problem of developing scheduling algorithms for an environment of parallel cluster tools, which is a special case of the parallel unrelated machines problem. At first we will describe the problem under consideration in detail and then present our scheduling environment and the idea of using slow down factors to predict lot cycle times to evaluate schedules and parts of them. This article is more a conceptual kind of work containing mostly basic thoughts to illustrate facets of the problem and first solution ideas. Nonetheless the authors see a high potential in examining these questions. Little research has been done on that issue so far.
REFERENCES
Note: OCR errors may be found in this Reference List extracted from the full text article. ACM has opted to expose the complete List rather than only correct and linked references.
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Atherton, L. F. and R. W. Atherton. 1995. Wafer Fabrication: Factory Performance and Analysis. Kluwer.
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Joo, Y.-J. and T.-E. Lee; 2004. "Virtual Control: A Virtual Cluster Tool for Testing and Verifying a Cluster Tool Controller and a Scheduler". IEEE Robotics & Automation Magazine, 11(3), 33--49.
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Niedermayer, H. and O. Rose. 2003. "A Simulation-based Analysis of the Cycle Time of Cluster Tools in Semiconductor Manufacturing". In Proceedings of the 15th European Simulation Symposium.
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Perkinson, T. L., P. K. McLarty, R. S. Gyurcsik, and R. K. Cavin III. 1994. "Single-Wafer Cluster Tool Performance: An Analysis of Throughput." IEEE Transactions on Semiconductor Manufacturing, 7 (3), 369--373.
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Perkinson, T. L., P. K. McLarty, R. S. Gyurcsik, and R. K. Cavin III. 1996. "Single-Wafer Cluster Tool Performance: An Analysis of the Effects of Redundant Chambers and Revisitation Sequences on Throughput." IEEE Transactions on Semiconductor Manufacturing, 9 (3), 384--400.
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Pinedo, M. 2001. Scheduling. Theory, Algorithms, and Systems. 2nd edition. Prentice-Hall.
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