Generation of design guarantees for interconnect matching

ABSTRACT

Manufacturable design requires matching of interconnects which have equal nominal dimensions. New design rules are projected to bring guarantee rules for interconnect matching. In this paper, we present a methodology to generate additional guarantees given the limited set of guarantees in the design manual. In order to achieve this, we propose a multi-function optimization method to extract parameters of a preliminary dimension- and distance-based process correlation model for interconnects. We propose an interconnect matching extraction method and suitable patterns useful for mismatch extraction. We have extracted matching guarantees while also considering the special case of edge matching using Monte Carlo analysis and field solvers. We have substantiated the experimentation with evaluations on an preliminary regression model and metric for mismatch.

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INDEX TERMS

Primary Classification:
  J. Computer Applications
  J.6 COMPUTER-AIDED ENGINEERING

General Terms:
Algorithms, Design

Keywords:
design guarantee generation, interconnect matching