Extraction and LVS for mixed-domain integrated MEMS layouts

ABSTRACT

As design of integrated MicroElectroMechanical Systems (MEMS) matures, there is an increasing need for verification of MEMS layouts. This requires a mixed-domain LVS (layout-versus-schematic) methodology capable of extracting an integrated schematic from the mixed-domain layout and verifying it against the designed schematic. This paper reports on a prototype implementation of MEMS LVS and a MEMS extractor, which, in addition to reconstructing the extracted schematic also captures the domain-specific parasitics in the individual devices. This schematic is then used by a custom schematic-versus-schematic comparator to match connectivity of various elements between the designed and extracted schematics. Finally, simulation of the extracted schematic also helps in capturing the true behavior of the system.

REFERENCES

• 1: Darrell Teegarden , Gunar Lorenz , Reinhard Neul, How to model and simulate microgyroscope systems, IEEE Spectrum, v.35 n.7, p.66-75, July 1, 1998 [doi>10.1109/6.694362]
• 2: G.K. Fedder and Q. Jing, "A Hierarchical Circuit-Level Design Methodology for Microelectromechanical Systems," IEEE Transactions on Circuits and Systems II (TCAS), vol. 46, no. 10, Oct. 1999, pp. 1309--1315.
• 3: J.V. Clark, D. Bindel, W. Kao, E. Zhu, A. Kuo, N. Zhou, J. Nie, J. Demmel, Z. Bai, S. Govindjee, K.S.J. Pister, M. Gu, A. Agogino, "Addressing the needs of complex MEMS design," Proceedings of MEMS '02, Piscataway, NJ, USA, 2002, pp. 204--9.
• 4: Nicholas R. Swart, A Design Flow for Micromachined Electromechanical Systems, IEEE Design & Test, v.16 n.4, p.39-47, October 1999 [doi>10.1109/54.808207]
• 5: M.A. Maher and H.J. Lee, "MEMS Systems Design and Verification Tools," Proceedings of SPIE Smart Structures and Materials, San Diego, CA, March 1998, pp. 40--48.
• 6: B. Baidya, S.K. Gupta, T. Mukherjee, "An Extraction based Verification Methodology for MEMS," Journal of Microelectromechanical Systems, vol. 11, no. 1, Feb. 2002, pp. 2--11.
• 7: G.K. Fedder, S. Santhanam, M.L. Reed, S.C. Eagle, D.F. Guillou, M.S.-C. Lu, and L.R. Carley, "Laminated high-aspect-ratio micro-structures in a conventional CMOS process," Sensors and Actuators, vol. A57, no. 2, pp. 103--110.
• 8: J.B. Rosenberg, "Geographical Data Structures Compared: A Study of Data Structures Supporting Region Queries," IEEE Transactions on Computer-Aided Design, vol. cad-4, no. 1, Jan. 1985, pp. 53--67.
• 9: H. Luo, G. K. Fedder, and L. R. Carley, "A 1mG Lateral CMOS-MEMS Accelerometer," Proceedings of MEMS '00, Miyazaki, Japan, Jan. 23--27, 2000, pp. 502--7.

INDEX TERMS

Primary Classification:
  C. Computer Systems Organization
  C.3 SPECIAL-PURPOSE AND APPLICATION-BASED SYSTEMS
      Subjects: Microprocessor/microcomputer applications

Additional Classification:
  I. Computing Methodologies
  I.3 COMPUTER GRAPHICS
      I.3.6 Methodology and Techniques
          Subjects: Standards

General Terms:
Design, Documentation, Experimentation

Keywords:
MEMS LVS, MEMS extraction, integrated MEMS, parasitics, verification