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ABSTRACT
Functional failures of VLSI circuits are caused by process-induced defects. Such defects have very complex physical characteristics and may be significantly different from the simplistic defect models assumed by typical fault modeling techniques. In the tutorial an overview of the actual mechanisms causing processing defects, and the defects' electrical manifestations will be discussed. It will be demonstrated that inadequate insight into the physics of processing defects and the manufacturing process may lead to inefficient testing of actual VLSI circuits.
REFERENCES
Note: OCR errors may be found in this Reference List extracted from the full text article. ACM has opted to expose the complete List rather than only correct and linked references.
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W.Maly, A.J. Strojwas, and S.W. Director, "VLSI Yield Prediction and Estimation: A Unified Framework", IEEE Trans. on Computer Aided Design, No. 1, January 1986, pp. 114-130.
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W. Maly, Atalas of I0 Technologies: An Introduction ito VLSI Processe,~, The Benjamin/Cummings Publishing Company, Inc., Menlo Park, California, 1987.
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C.H. Sequin and Y. Tamir, Fault Tolerant VLSI Multieomputers in VLSI CAD Tools and Applications, Editors W. Fichtner and M. Morf), Kluwer Academic Publishers, Boston, Massachusett,~ , The Kluwer International Series in Engineering and Computer Science , 1987.
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W.Maly, "Modeling of Lithography Related Yield Losses for CAD of VLSI Circuits", IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, Vol. CAD-4, No. 4, July 1985, pp. 166-177.
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W. Maly, M.E. Thomas, J.D. Chian, and M. Campbell, ~'Double-Bridge Test Structure for the Evaluation of Type, Size and Density of Spot Defects", P~esearch Report CMUCAD-87-2, SRC-CMU Center for Computer-Aided Design, Carnegie-Mellon University, February 1987.
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W.Maly, J.Ferguson and J.P.Shen, "Systematic Characterization of Physical Defects for Fault Analysis of MOS IC Cells", In Proc. of the International Test Conference 1984, Philadelphia, October 1984, pp. 390-399.
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H.Walker and S.W.Director, "Yield Simulation for integralted Circuits", Proc. of ICCAD-88, IEEE, Santa Clara, Sept. 1983, pp. 256-257.
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J. Ferguson , "Ph.D. thesis in preparation."
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W. Maly, ~'Fault Models for the NMOS Programmable Logic Array", In Proe. of Custom Integrated Circuits Con feremce, May 1986.
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F. Beenker, "Private communication.".
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W.Maly and J.Deszczka, "Yield Estimation Model for VLSI Artwork Evaluation", Electronics Letters, Vol. 19, No, 6, Mar. 19~3, pp. 226-227.
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CITED BY 15
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Piet Engelke , Ilia Polian , Juergen Schloeffel , Bernd Becker, Resistive bridging fault simulation of industrial circuits, Proceedings of the conference on Design, automation and test in Europe, March 10-14, 2008, Munich, Germany
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